MEMS mirrors using sub-wavelength High- Contrast-Gratings with asymmetric unit cells

Abstract

High-contrast gratings (HCG) are ultra-thin elements operating in sub-wavelength regime with the period of the grating smaller than the wavelength and with the high-index grating material fully surrounded by low-index material. Design of MEMS mirrors made from HCG with specific reflectivity response is of great practical interest in integrated optoelectronics. We theoretically investigate design of the spectral response for HCGs with the complex unit cells. We show that the spectral response can be tailored via the unit cell perturbations and with the asymmetric unit cell perturbations may introduce completely new spectral response. Our results can serve as guidance for the design of the complex HCGs and help with the choice of the efficient initial grating topology prior to global optimization procedure.