DOPING OF NANO-SIZED DIAMOND LIKE CARBON FILMS AND THEIR CHARACTERIZATION BY MICRO RAMAN SPECTROSCOPY
Capabilities of the rf plasma beam source in deposition of ultra thin diamond like carbon for the hard disk drive applications have been studied. Nano-sized films were doped by nitrogen, hydrogen and silicon and characterized by micro Raman spectroscopy. Projected ranges of incident carbon ions into the magnetic layer as well as growing film were calculated by Monte Carlo simulation. Ion ranges at 100 eV incident energy were around 0.5 nm. With micro Raman spectroscopy is possible to qualitatively determine optimal deposition parameters and to follow changes in the film properties and carbon binding structure in amorphous matrix with hydrogen, nitrogen and silicon doping elements.
 J. Robertson, Requirements of ultrathin carbon coatings for magnetic storage technology, Tribology International, Vol. 36−4−5 (2003) 405−415.
 P. J. Grundy, Thin film magnetic recording media, J. Phys. D: Appl. Phys. 31 (1998) 2975−90.
 Thin Film Processes, Edited by John L. Vossen and Werner Kern, Academic Press, Inc, Boston 1991.
 J. Choi, M. Kawaguchi, T. Kato, M. Ikeyama, Deposition of perfluoropolyether lubricant films on Si-incorporated diamondlike carbon surfaces, J. Appl. Phys., Vol. 99 (2006) 08N109.
 M. U. Curuz, V. P. David, Y. W. Chung, M. M. Lacerda, C. S. Bhatia, Y. H. Yu, S. C. Lee, Corro-sion performance of ultrathin carbonnitride overcoat synthesized by magnetron sputtering, Thin Solid Films, Vol. 381 (2001) 6−9.
 A. Anders, F. W. Ryan, Ultrathin ta-C films on heads deposited by twist-filtered cathodic arc carbon plasma, Symposium on Interface tribology towards 100 Gbit/in2 and <beyond ASME, TRIB, Vol. 10, 43−50.